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Infrared gas sensor for EPD gas detection in CVD equipment for thin film deposition process in semiconductor industry
$35714.29 / platform
Reference Price10platform (Min. Order)
Ship From
Wuhan, Hubei
Shipping
To be negotiated with the supplier
Customization
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Key Attributes
Details
Price Disclaimer
Brand
Sifang Instrument
Model number
Gasboard-2061
packaging
boxed
Part status
on sale
type
Gas analyzer
Minimum packaging quantity
1
Detection Principle
NDIR
Gas detection
WF6、CF4、SF6、NF3、CO2
Measuring range
1~264ppm(0~200mTorr)
repetitiveness
±0.5%
Linear
±1%F.S.
detection limit
1ppm
Details
Price Disclaimer
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