Infrared gas sensor Gasboard-2060 semiconductor industry chamber cleaning endpoint detection

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Attributes

Infrared gas sensor Gasboard-2060 semiconductor industry chamber cleaning endpoint detection

$25714.29 / individual

Reference Price

10individual (Min. Order)

Ship From

Wuhan, Hubei

Shipping

To be negotiated with the supplier

Customization

For customization requests, please

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Brand

Sifang Instrument

Does it support customized processing

Yes

Is it imported

Measurement object

WF6、SiF4、CF4、SF6、NF3、CO2

Measurement repeatability

±0.5%

Test Items

SiF4、CF4、SF6、NF3、CO2

variety

gas detector

Model number

Gasboard-2060

linear error

±1%F.S.

detection limit

1ppm

Measuring range

1~264ppm(0~200mTorr)

Detection Principle

NDIR

Details

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